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VACUUM PUMP

ISP DRY SCROLL VACUUM PUMP

ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps. Our oil-free scroll vacuum pumps are compact and less noise/vibration emitting than other dry vacuum pumps. They are highly valued by customers who need clean, high quality vacuum, especially in analytical and semiconductor related fields.

ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. ISP is free from installation restrictions because of its air-cooled system. ISP maintains low power consumption from atmosphere to maximum pressure. Maximum pressure is 1[Pa] High reliability



ISP APPLICATION

  • Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
  • Accelerator, Synchrotron Radiation
  • Surface modification, Electron beam process
  • Gas recovery devices
  • Vacuum equipment
  • Leak detectors
  • Device handling system
  • Vacuum furnace, Heat treatment furnace
  • Laboratory use
  • Vacuum packaging machine



ISP 50



ISP 90



ISP 250C



ISP 500C



ISP 1000

DVSL DRY SCROLL VACUUM PUMP



APPLICATIONS

  • Vacuum Chuck
  • Vacuum Transport
  • Vacuum Forming
  • Deaerator
  • Gas Substitution
  • Vacuum Drying
  • Vacuum Packing
  • Cryopump Regeneration
  • Leak Test
  • Roughing for TMP



FEATURES

  • DVSL scroll pump is equipped with dry vacuum system without using lubricating oil or sealing water
  • No gears result in no need to exchange of gear oil and no risk of leaked lubricating oil.
  • Easy – maintenance available.
  • Generated clean vacuum keeps installation area clean.
  • Equipped cooling system frees from the trouble of controlling cooling water and selecting installation site.
  • Excellence in displacing water vapor
  • Reliable Design – Little power variance between atmospheric pressure and the ultimate pressure allows repeated continuous operation between atmospheric pressure and vacuum.
  • Standard equipped hour meter enables easy daily operation. Only supplied with DVSL-500C / 501C
  • Excellence in energy-savings in vacuum area. 24 hrs operations secured.



DVSL 100C



DVSL 500C/501C

GVSU DRY SCROLL VACUUM PUMP

ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps. Our oil-free, scroll vacuum pumps are compact and emit less noise and vibration than other dry vacuum pumps. They are highly valued by customers who need clean, high quality vacuum, especially in the analytical and semiconductor related fields.

The GVSU-500B scroll pump is equipped with a dry vacuum system so there is no need for lubricating oil or sealing water. The absence of gears means that it is low-maintenance and there is no need to change gear oil and no risk of lubricating oil leaks. Generator powered vacuum keeps the installation area clean. It is equipped with a water cooling system which eliminates the need to control water cooling on site. The GVSU-500B pump is excellent in displacing water vapor. Low power variance between atmospheric pressure and maximum pressure allows repeated, continuous operation between atmospheric pressure and vacuum. This pump uses up less energy and can lead to savings in the vacuum area. 24-Hour operation secured.



APPLICATION FOR OIL-FREE SCROLL PUMP

  • Vacuum Forming
  • Deairator
  • Vacuum Chuck
  • Regenerative
  • Vacuum Cooling
  • Vacuum Drying only for water based
  • Ceramic Industry
  • Gas Substitution
  • Pumping for Electron Tube



GVSU 500B